Semiconductor memory device

ABSTRACT

A semiconductor memory device includes a memory cell array, a voltage generation circuit that generates a voltage applied to the memory cell array, the voltage generation circuit including a plurality of boosting circuits connected in series between an input terminal and an output terminal, and a switching circuit configured to short-circuit one or more of the boosting circuits to the input terminal, and a control circuit that controls a conduction state of the switching circuit to vary the number of boosting circuits that are driven to generate the voltage applied to the memory cell array.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based upon and claims the benefit of priority fromJapanese Patent Application No. 2014-051850, filed Mar. 14, 2014, theentire contents of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a semiconductor memorydevice.

BACKGROUND

In a semiconductor memory device such as a NAND-type flash memory, aboosting circuit generates voltages of various levels according tooperation types. In general, a nonvolatile semiconductor memory deviceis provided with boosting circuits in a plurality of stages, and theboosting circuits of the required number of stages are selectivelydriven according to a required voltage level.

Recently, there has been a demand for lower power consumption and lowercurrent consumption in the semiconductor memory device. On the one hand,current consumption in the semiconductor memory device is increasingaccording to progress of making the semiconductor memory device highlydense and miniaturized. In such a situation, it is important to reduce apeak current in the semiconductor memory device. In the boostingcircuit, it is also important to reduce such a peak current.

DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating a configuration of asemiconductor memory device according to an embodiment.

FIG. 2 is a diagram illustrating a configuration of a boosting circuitaccording to the embodiment.

FIG. 3 is a diagram illustrating a relationship of data stored in amemory cell and a threshold voltage.

FIG. 4 is a diagram describing a voltage applied to a NAND cell unitwhen a write operation is performed.

FIG. 5 is a diagram describing a voltage applied to the NAND cell unitwhen a read operation is performed.

FIG. 6 is a diagram describing a voltage applied to the NAND cell unitwhen an erase operation is performed.

FIG. 7 is a schematic circuit block diagram illustrating a configurationof a voltage generation circuit.

FIG. 8 is a graph illustrating an effect of the present embodiment.

FIG. 9 is a graph illustrating an effect of the present embodiment.

FIG. 10 is a graph illustrating an effect of the present embodiment.

FIG. 11 is a graph illustrating an effect of the present embodiment.

FIG. 12 is a graph illustrating an effect of the present embodiment.

FIG. 13 shows two graphs illustrating an effect of the presentembodiment.

FIG. 14A is a schematic circuit diagram illustrating a configuration ofthe voltage generation circuit.

FIG. 14B is a schematic circuit diagram illustrating a configuration ofthe voltage generation circuit.

FIG. 15 is a circuit diagram illustrating a specific configurationexample of the voltage generation circuit.

FIG. 16 is a timing chart illustrating an operation of the voltagegeneration circuit of FIG. 15.

FIG. 17 is a circuit diagram illustrating another specific configurationexample of the voltage generation circuit.

DETAILED DESCRIPTION

A semiconductor memory device according to the embodiments allows a peakcurrent of a boosting circuit to be reduced.

In general, according to one embodiment, a semiconductor memory deviceincludes a memory cell array, a voltage generation circuit thatgenerates a voltage applied to the memory cell array, the voltagegeneration circuit including a plurality of boosting circuits connectedin series between an input terminal and an output terminal, and aswitching circuit configured to short-circuit one or more of theboosting circuits to the input terminal, and a control circuit thatcontrols a conduction state of the switching circuit to vary the numberof boosting circuits that are driven to generate the voltage applied tothe memory cell array.

Next, a semiconductor memory device according to an embodiment will bedescribed in detail with reference to the drawings.

FIG. 1 is a schematic diagram illustrating a configuration of asemiconductor memory device according to an embodiment. In the followingdescription, a NAND-type flash memory will be described as an example ofthe semiconductor memory device. However, a voltage generation circuitaccording to the embodiment is not limited to the NAND-type flashmemory, and it should be understood that the voltage generation circuitmay be used in various semiconductor memory devices.

As illustrated in FIG. 1, the NAND-type flash memory includes a memorycell array 1, a sense amplifier circuit 2, a row decoder 3, a controller4, an input/output buffer 5, a ROM fuse 6, and a voltage generationcircuit 7. The controller 4 operates as a control unit for the memorycell array 1. The memory cell array 1 includes NAND cell units 10 whichare arranged in a matrix. One of the NAND cell units 10 includes aplurality of memory cells MC (MC0, MC1, . . . , MC31) which areconnected in series, and selective gate transistors S1 and S2 which areconnected to both ends of the NAND cell unit 10. Although it is notillustrated in the drawings, one memory cell MC may include a stackedgate-type configuration. That is, the memory cell MC includes a floatinggate electrode as a charge storage layer which is formed on a gateinsulating film (a tunnel insulating film) formed between a drain and asource, and a control gate electrode which is formed on the floatinggate electrode through an inter-gate insulating film. The control gateelectrode of the memory cell MC in the NAND cell unit 10 is connected toword lines WL (WL0, WL1, . . . , WL31) which are different from eachother.

The source of the selective gate transistor S1 is connected to a commonsource line CELSRC, and the drain of the selective gate transistor S2 isconnected to a bit line BL. The gate electrodes of the selective gatetransistors S1 and S2 are connected to selective gate lines SG1 and SG2which are in parallel with the word lines WL, respectively. A set ofmemory cells MC which share one word line WL constitutes one page or aplurality of pages. When the memory cell MC stores multi-valued data, orwhen control is performed by switching between an even-numbered bit lineand an odd-numbered bit line, the set of the memory cells MC which sharethe one word line WL may constitute a plurality of pages equal to 2 ormore pages.

As illustrated in FIG. 1, a set of a plurality of NAND cell units 10which shares the word line WL and the selective gate lines SG1 and SG2constitutes a block BLK which is a unit of erasing data. The memory cellarray 1 is provided with a plurality of blocks BLK (BLK0, BLK1, . . . ,BLKn) in a direction of the bit line BL. The memory cell array 1including the plurality of blocks is formed in one cell well (CPWELL) ofa silicon substrate.

The bit line BL of the memory cell array 1 is connected to the senseamplifier circuit 2 which includes a plurality of sense amplifiers SA.The sense amplifiers SA constitute a page buffer for retaining writingdata by sensing reading data. The sense amplifier circuit 2 includes acolumn selection gate. The row decoder (including a word line driverWDRV) 3 selects and drives the word line WL and the selective gate linesSG1 and SG2.

The input/output buffer 5 receives command data or address data inaddition to memory cell data between the sense amplifier circuit 2 andan external input and output terminal. The controller 4 receives anexternal control signal such as a write enable signal WEn, a read enablesignal REn, an address latch enable signal ALE, and a command latchenable signal CLE, and controls an entire memory operation.

Specifically, the controller 4 includes a command interface or anaddress retention and transfer circuit, and determines whether supplieddata is the writing data or the address data. According to adetermination result, the writing data is transferred to the senseamplifier circuit 2, and the address data is transferred to the rowdecoder 3 or the sense amplifier circuit 2. In addition, the controller4 performs control such as sequence control of a read operation, a writeoperation, or an erase operation, and applied voltage control, based onthe external control signal.

The voltage generation circuit 7 generates a desired pulse voltage basedon a control signal from the controller 4. The voltage generationcircuit 7 generates various voltages which are required for the writeoperation, the erase operation, and the read operation.

Here, in the voltage generation circuit 7, a voltage generation circuit7A which includes a plurality of boosting circuits BC for generating avoltage is provided. The voltage generation circuit 7A generates avoltage which is required for the operation by operating a charge pumpprovided in the boosting circuit BC. As the charge pump, for example, aconfiguration as illustrated in FIG. 2 is used. The charge pump is acircuit in which one end of a capacitor C is connected to each stage ofserially connected diodes D (transfer transistors), and the other end ofthe capacitor C is supplied with a clock signal. A potential of theother end of the capacitor C is controlled based on the clock signal,and according to the controlled potential of the other end of thecapacitor, the potential of the one end side of the capacitor connectedto the diode D increases. The charge pump generates a boost voltage byrepeating the potential control operation. The plurality of boostingcircuits BC including such a charge pump are serially connected asdescribed below, and constitute the voltage generation circuit 7A,thereby allowing a high voltage to be generated. In addition, in thevoltage generation circuit 7, a voltage detecting circuit 7B fordetecting an output voltage (Vout) level generated by the boostingcircuit BC is provided. Furthermore, the boosting circuit of FIG. 2illustrates a circuit which configures the diode D by making thetransfer transistor to be a diode-connected transistor. In a case ofthis circuit mode, a voltage to be transferred to the next stage of thediode D (the transfer transistor) is a value (a threshold-subtractedvalue) which is lowered by a threshold voltage of the transfertransistor. The boosting circuit with a small number of stages is lessaffected by the subtracted threshold, and such a circuit mode is notsuitable for the boosting circuit with a large number of stages. For theboosting circuit with a large number of stages in which the obtainedoutput voltage level is high, a circuit mode in which a voltage levelenabling the threshold voltage of the transfer transistor to becancelled is applied to the gate is general. In this disclosure, thelatter circuit mode is adopted, but the former circuit mode which isable to simply illustrate a fundamental mode of the boosting circuit isillustrated in FIG. 2.

FIG. 3 is a diagram illustrating a relationship of data stored in thememory cell MC and a threshold voltage. When binary data is stored, acase where the memory cell MC includes a negative threshold voltage isdefined as “1” cell retaining logic “1” data, and a case where thememory cell MC includes a positive threshold voltage is defined as “0”cell retaining logic “0” data. An operation for setting the memory cellMC in a “1” data state is the erase operation, and an operation forsetting the memory cell MC in a “0” data state is the write operation.

Write Operation

FIG. 4 is a diagram describing a voltage applied to the NAND cell unit10 when a write operation is performed. The write operation is performedin units of a page. During the write operation, a writing pulse voltageVpgm (approximately 10 V to 25 V) is applied to the selected word line(WL1) in the selected block BLK. In addition, a middle voltage Vpass(approximately 5 V to 15 V) is applied to the unselected word lines(WL0, WL2, WL3, . . . ), and a voltage Vsg is applied to the selectivegate line SG2.

Prior to the write operation, the bit line BL and the NAND cell unit 10are pre-charged according to the writing data. Specifically, when “0”data is written, 0 V is applied to the bit line BL from the senseamplifier circuit 2. The bit line voltage is transferred to a channel ofthe memory cell MC connected to the selected word line WL1 through theselective gate transistor S2 and the unselected memory cell MC.Accordingly, under conditions of the write operation described above, anelectrical charge is injected to the floating gate electrode from thechannel of the selected memory cell MC, and the threshold voltage of thememory cell MC is shifted to a positive side (“0” cell).

When “1” data is written (that is, “0” data is not written in theselected memory cell MC, no writing), a voltage Vdd is applied to thebit line BL. After the bit line voltage Vdd is lowered by a value of thethreshold voltage of the selective gate transistor S2 and transferred tothe channel of the NAND cell unit, the channel is in a floating state.Therefore, when the writing pulse voltage Vpgm or the middle voltageVpass described above is applied, the channel voltage increases by acapacitance coupling, and the electrical charge is not injected to thefloating gate electrode. Accordingly, the memory cell MC retains “1”data.

Read Operation

FIG. 5 is a diagram describing a voltage applied to the NAND cell unit10 when a read operation is performed. The data read operation providesa reading voltage 0 V to the word line WL (the selected word line WL1)to which the selected memory cell MC of the NAND cell unit 10 isconnected. In addition, a reading pulse voltage Vread (approximately 3 Vto 8 V) is applied to the word lines WL (the unselected word lines WL0,WL2, WL3, . . . ) to which the unselected memory cell MC is connected.At this time, the sense amplifier circuit 2 detects whether or not acurrent flows through the NAND cell unit 10, and determines the data.

Erase Operation

FIG. 6 is a diagram describing a voltage applied to the NAND cell unit10 when an erase operation is performed. The erase operation isperformed in units of a block. As illustrated in FIG. 6, in the eraseoperation, an erasing voltage Vera (approximately 10 V to 24 V) isapplied to the cell well (CPWELL), and 0 V is applied to the entire wordlines WL in the selected block. The electrical charge of the floatinggate electrode of each of the memory cells MC is drawn into the cellwell side by a FN tunnel current, and the threshold voltage of thememory cell MC decreases. At this time, in order not to break gate oxidefilms of the selective gate transistors S1 and S2, the selective gatelines SG1 and SG2 are in the floating state. In addition, the bit lineBL and the source line CELSRC are also in the floating state.

As illustrated in FIG. 7, the voltage generation circuit 7 is providedwith a plurality of (for example, N) boosting circuits BC(i) (i=1 to N),and these boosting circuits BC (i) are connected in cascade between aninput voltage terminal N1 to which an input voltage Vin is input and anoutput voltage terminal N2. Since each of the plurality of boostingcircuits BC is provided with the ability to boost the voltage, and Nboosting circuits BC are connected in cascade, the output voltage Voutcan be increased to a value which is approximately proportional to thenumber N rather than the input voltage Vin.

However, when the input voltage Vin is boosted, there is a problem inwhich constantly driving the N boosting circuits BC at the same timecauses current consumption to be increased and power efficiency to bedecreased.

FIG. 8 illustrates a relationship between the number of boostingcircuits BC to be connected in cascade and voltage-currentcharacteristics. As the number of boosting circuits BC to be connectedin cascade increases, an output current Iout obtained at the same outputvoltage Vout increases.

In addition, FIG. 9 illustrates a relationship between the number ofboosting circuits BC to be connected in cascade and voltage-powerefficiency characteristics. It is found that a value of the outputvoltage Vout by which maximum power efficiency is obtained is changedaccording to the number of boosting circuits BC to be connected incascade.

Therefore, in the voltage generation circuit 7 according to the presentembodiment, it is possible to adopt a configuration of increasing thenumber of boosting circuits BC to be driven within a period in which theoutput voltage Vout of the output terminal N2 increases. For example, asillustrated in FIG. 7, immediately after starting a boost operation,only N/a boosting circuits BC of the N boosting circuits are driven. Asthe boost operation proceeds, the number of boosting circuits BC to bedriven increases to N/b (b<a), and to N. The N/a boosting circuits BCare N/a boosting circuits BC of the output voltage terminal N2 side, andthe N/b boosting circuits BC are N/b boosting circuits BC of the outputvoltage terminal N2 side.

For this reason, the input voltage terminal N1 is short-circuited fromthe input terminal of heads of rows of the N/a and the N/b boostingcircuits BC to be driven by switching circuits SW (SW1, SW2). When theentire N boosting circuits are driven, the entire switching circuits SWare maintained in a non-conduction state. Furthermore, although FIG. 7exemplarily illustrates a case where the number of switching circuits SWis 2, the number of switching circuits SW is not limited to 2, and maybe equal to 3 or more.

Thus, an effect of a case where the number of boosting circuits BC to bedriven gradually increases is described in FIG. 10 and FIG. 11. When theentire N boosting circuits BC are operated immediately after startingthe boost operation (w/o stage control), although the high outputcurrent Iout is obtained as illustrated in a graph of FIG. 10 in a stagewhere the output voltage Vout is still low, the power efficiencydecreases as illustrated in a graph of FIG. 11.

On the other hand, when the number of boosting circuits BC to beoperated gradually increases as in this embodiment (w/ stage control),although the output current Iout slightly decreases as illustrated inthe graph of FIG. 10, it is possible to maintain the power efficiency ata high level even in a stage where the output voltage Vout is still low.

FIG. 12 describes an operational example of the voltage generationcircuit 7 when the output voltage Vout is generated. The output voltageVout of the voltage generation circuit 7 increases to a predeterminedvoltage, for example, when setup is performed from a reset state. Atthis time, the entire N boosting circuits BC of the voltage generationcircuit 7 are not driven at the same time after starting poweractivation, but the number of boosting circuits BC to be drivenincreases, for example, to N/a, to N/b, and to N in a phased manner.Therefore, it is possible to obtain the effect illustrated in FIG. 10and FIG. 11. In addition, it is possible to perform the same operationnot only when the setup is performed but also when various wirings (suchas a word line) are charged, for example.

FIG. 13 illustrates a temporal transition of the output voltage Vout andcurrent consumption Icc in a practical voltage generation circuit 7. Ingraph (A) and graph (B) of FIG. 13, a dot-lined graph indicates a casewhere the N boosting circuits BC are constantly operated, and asolid-lined graph indicates a case where the operation according to thisembodiment is performed. Regarding the output voltage Vout, a largechange is not observed in both graphs, but regarding the currentconsumption Icc, it is found that a peak value of the currentconsumption Icc is restrained by the operation of this embodiment.

In the voltage generation circuit 7, the voltage detecting circuit 7Bdetects the change of the output voltage Vout of the output voltageterminal N2, for example, as illustrated in FIG. 14A, so that based on adetection result thereof, switch determination and control of the numberof boosting circuits BC to be concurrently operated are able to beperformed through the controller 4 (the switching circuit SW is notillustrated in FIG. 14A). In an example of FIG. 14A, the voltagedetecting circuit 7B includes a voltage-dividing resistor 71 and acomparator 72, and performs the switch control in the controller 4 basedon a comparison result of the comparator 72.

In addition, it is possible to perform the switch control describedabove by measuring a time taken from inputting a predetermined controlsignal or by delaying the control signal by a delay circuit, in additionto or instead of the detection of the output voltage Vout. FIG. 14Bincludes a delay circuit 4A in addition to the voltage detecting circuit7B (the switching circuit SW is not illustrated in FIG. 14B). The delaycircuit 4A generates a delay signal SETUP_DLY by delaying a controlsignal SETUP which indicates the start of the boost operation for apredetermined time according to a clock signal CLK. The control circuit4 may perform the switch control described above according to the delaysignal SETUP_DLY.

FIG. 15 illustrates a specific configuration example of a deviceincluding the voltage detecting circuit 7B and the delay circuit 4A asillustrated in FIG. 14B. Here, an example in which the number ofboosting circuits BC is 6, and the number of switching circuits SW is 2(SW1, SW2) is illustrated.

In the configuration example of FIG. 15, as a circuit for driving theboosting circuit BC, drivers 7 c(1) to 7 c(3) are provided in thevoltage generation circuit 7. Here, an example in which the driver 7c(1) drives the boosting circuits BC(1) and BC(2), the driver 7 c(2)drives the boosting circuits BC(3) and BC(4), and the driver 7 c(3)drives the boosting circuits BC(5) and BC(6) is illustrated. The driver7 c(1) controls the boosting circuits BC(1) and BC(2) according to aclock signal PMPCLK_1 supplied from the control circuit 4, the driver 7c(2) controls the boosting circuits BC(3) and BC(4) according to a clocksignal PMPCLK_2 supplied from the control circuit 4, and the driver 7c(3) controls the boosting circuits BC(5) and BC(6) according to a clocksignal PMPCLK_3 supplied from the control circuit 4.

Thus, in the embodiment, a configuration in which one driver 7 c(i)switches a plurality of (in this example, 2) boosting circuits BC froman inactivated state to an activated state according to an enable signalENBi is adopted. According to the configuration, it is possible todecrease the number of drivers, and to reduce a circuit area. In thisregard, it is possible to adopt a configuration in which one driver 7c(i) controls a single boosting circuit BC.

In addition, the respective boosting circuits BC are activated when theenable signals ENB1 to ENB3 supplied from the control circuit 4 are “H”,and the operation starts. The boosting circuits BC(1) and BC(2) receivethe enable signal ENB1, the boosting circuits BC(3) and BC(4) receivethe enable signal ENB2, and the boosting circuits BC(5) and BC(6)receive the enable signal ENB3.

In addition, the switching circuits SW1 and SW2 are configured to beswitched between a conduction state (ON) and a non-conduction state(OFF) by inputting control signals SW_ENB1 and SW_ENB2 from the controlcircuit 4, respectively.

Next, an operational example of a circuit in FIG. 15 will be describedwith reference to a timing chart in FIG. 16. At time t1, when thecontrol signal SETUP increases to “H”, the enable signal ENB3 and thecontrol signal SW_ENB1 also increase to “H” at substantially the sametime, so that only the boosting circuits BC(5) and BC(6) are activated,and the other boosting circuits BC(1) to BC(4) are still in theinactivated state. Furthermore, the switching circuit SW1 is switched tothe conduction state, so that the activated boosting circuits BC(5) andBC(6) are connected between the input voltage terminal N1 and the outputvoltage terminal N2.

After that, at time t2, the signal SETUP_DLY in which the control signalSETUP is delayed for a predetermined time by the operation of the delaycircuit 4A increases to “H”. The control circuit 4 causes the enablesignal ENB2 and the control signal SW_ENB2 to increase to “H” byreceiving the delay signal, and the control signal SW_ENB1 to be loweredto “L”. Therefore, the transition of the boosting circuits BC(3) toBC(6) to the activated state is performed, and the switching circuit SW2is switched to the conduction state instead of the switching circuitSW1.

After that, at time t3, the comparison circuit 72 detects that theoutput voltage Vout goes up to a value which is several V smaller than atarget value, and a flag signal FLG becomes “H”. The control circuit 4switches the enable signal ENB1 to “H” and the control signal SW_ENB2 to“L” by receiving the flag signal. Therefore, the transition of theentire boosting circuits BC(1) to BC(6) to the activated state isperformed, and the switching circuits SW1 and SW2 are concurrently inthe non-conduction state. Accordingly, the entire boosting circuitsBC(1) to BC(6) are in a state of contributing to the boost operation.

FIG. 17 illustrates a specific configuration example of a deviceincluding only the voltage detecting circuit 7B without including thedelay circuit 4A as illustrated in FIG. 14A. Instead of the delaycircuit 4A, the comparison circuit 72 includes 2 comparators 72A and72B, and outputs 2 types of flag signals FLG1 and FLG2. The controlcircuit 4 switches logic of the enable signals ENB1 to ENB3 and thecontrol signals SW_ENB1 and SW_ENB2 according to the flag signals FLG1and FLG2.

Effects

As described above, according to this embodiment, since the number ofdrives of the plurality of boosting circuits BC increases according to aprocedure of the boost operation, it is possible to reduce the peakcurrent of the current consumption in the boosting circuit BC. Inaddition, at the same time, it is possible to effectively operate theboosting circuit. At this time, the input voltage terminal N1 and theboosting circuit BC during driving are connected by the switchingcircuit, thereby allowing the output voltage terminal N2 to beconstantly fixed.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions.

What is claimed is:
 1. A semiconductor memory device comprising: amemory cell array; a voltage generation circuit configured to generate avoltage applied to the memory cell array, the voltage generation circuitincluding a plurality of boosting circuits connected in series betweenan input terminal and an output terminal, and a switching circuitconfigured to short-circuit one or more of the boosting circuits to theinput terminal; and a control circuit configured to control a conductionstate of the switching circuit to vary the number of boosting circuitsthat are driven to generate the voltage applied to the memory cellarray.
 2. The device according to claim 1, wherein the switching circuitincludes a first switch connected in parallel to a first group ofboosting circuits between the input terminal and a first intermediatenode, the first intermediate node being located between the inputterminal and the output terminal.
 3. The device according to claim 2,wherein the switching circuit includes a second switch connected inparallel to a second group of boosting circuits that includes the firstgroup of boosting circuits between the input terminal and a secondintermediate node, the second intermediate node located between thefirst intermediate node and the output terminal.
 4. The device accordingto claim 1, further comprising: a voltage detecting circuit configuredto detect a voltage level at the output terminal, wherein the controlcircuit increases the number of boosting circuits to be driven accordingto a detection result of the voltage detecting circuit.
 5. The deviceaccording to claim 4, wherein the control circuit controls theconduction state of the switching circuit according to the detectionresult of the voltage detecting circuit.
 6. The device according toclaim 1, further comprising: a delay circuit configured to delay aninput control signal, wherein the control circuit increases the numberof boosting circuits to be driven based on a signal output from thedelay circuit.
 7. The device according to claim 6, wherein the controlcircuit controls the conduction state of the switching circuit based onthe signal output from the delay circuit.
 8. A semiconductor memorydevice comprising: a memory cell array; a voltage generation circuitconfigured to generate a voltage applied to the memory cell array, thevoltage generation circuit including a plurality of boosting circuitsconnected in series between an input terminal and an output terminal,and a plurality of switches, each of which has a first end connected tothe input terminal and a second end connected to an intermediate nodethat is between two of the boosting circuits; and a control circuitconfigured to control a conduction state of the switches to vary thenumber of boosting circuits that are driven to generate the voltageapplied to the memory cell array.
 9. The device according to claim 8,wherein one or more of the boosting circuits that are between theintermediate node and the output terminal are driven to generate thevoltage applied to the memory cell array regardless of the conductionstate of the switches.
 10. The device according to claim 8, wherein theswitches includes a first switch connected in parallel to a first groupof boosting circuits between the input terminal and a first intermediatenode, the first intermediate node being located between the inputterminal and the output terminal.
 11. The device according to claim 10,wherein the switches includes a second switch connected in parallel to asecond group of boosting circuits that includes the first group ofboosting circuits between the input terminal and a second intermediatenode, the second intermediate node located between the firstintermediate node and the output terminal.
 12. The device according toclaim 8, further comprising: a voltage detecting circuit configured todetect a voltage level at the output terminal, wherein the controlcircuit increases the number of boosting circuits that are drivenaccording to a detection result of the voltage detecting circuit. 13.The device according to claim 12, wherein the control circuit controlsthe conduction state of the switches according to the detection resultof the voltage detecting circuit.
 14. The device according to claim 8,further comprising: a delay circuit configured to delay an input controlsignal, wherein the control circuit increases the number of boostingcircuits that are driven based on a signal output from the delaycircuit.
 15. The device according to claim 14, wherein the controlcircuit controls the conduction state of the switches based on thesignal output from the delay circuit.
 16. A voltage generation methodfor a memory cell array of a semiconductor memory device, the methodcomprising: driving a first group of boosting circuits connected inseries between an input terminal and an output terminal during a firstperiod; driving a second group of boosting circuits connected in seriesbetween the input terminal and the output terminal during a secondperiod after the first period, the second group of boosting circuitsincluding the first group of boosting circuits; and driving a thirdgroup of boosting circuits connected in series between the inputterminal and the output terminal during a third period after the secondperiod, the third group of boosting circuits including the first andsecond groups of boosting circuits.
 17. The method according to claim16, wherein the first group of boosting circuits is driven in responseto an input control signal.
 18. The method according to claim 17,further comprising: detecting a voltage level at the output terminal,wherein the second group of boosting circuits is driven when the voltagelevel is greater than a first voltage level, and the third group ofboosting circuits is driven when the voltage level is greater than asecond voltage level that is higher than the first voltage level. 19.The method according to claim 17, further comprising: delaying the inputcontrol signal, wherein the second group of boosting circuits is drivenbased on the delayed input control signal.
 20. The method according toclaim 20, further comprising: detecting a voltage level at the outputterminal, wherein the third group of boosting circuits is driven whenthe voltage level reaches a predetermined voltage level.